摘要
为实现双探针原子力显微镜的探针对准，用探针A对探针B的成像进行了深入的研究。首先对音叉探针进行有限元仿真，分析探针的机械特性。其次用锁相放大器获取探针的幅度和频率信号，让探针接近样品（硅片）以获得系统的分辨率。最后在YOZ平面用探针A对探针B扫描成像，逐步缩小扫描范围并同时减小扫描步进。实验表明，探针的分辨率优于1nm，双探针对准精度可达5nm。
In order to align two probes of dual-probe atomic force microscope （AFM）, it is necessary to establish a measuring head to do in-depth research on the probe A scanning the probe B. Firstly, the mechanical characteristics of the probe are obtained by finite element （FE） simulations. Secondly, using the locked-in amplifier to attain the amplitude and frequency signals to analyze the system resolution （ better than 1 nm）, the probe is rotated 90 degrees compared traditional AFM. Lastly, probe B is scanned by probe A in YOZ plane, reducing the scanning range and scanning step gradually. The alignment accuracy is of 5 nm.
出处
《计量学报》
CSCD
北大核心
2016年第1期1-5,共5页
Acta Metrologica Sinica
基金
国家科技支撑计划项目(2011BAK15B02)
关键词
计量学
双探针
原子力显微镜
音叉探针
metrology
dual probes
atomic force microscope
tuning fork probe
