摘要
目的制备AlCoCrCu_（0.5）NiFe高熵合金氧化物薄膜,并对其光学性能进行表征。方法使用磁控溅射设备在单晶硅片和玻璃上制备AlCoCrCu_（0.5）NiFe高熵合金氧化物薄膜,并对膜进行退火处理。使用椭圆偏振光谱仪对薄膜的光学特性进行分析。结果随着氧含量的增加,折射系数减小。当光波长为633 nm时,折射系数为1.69~2.40。当氧分压为10%,折射率色散曲线在475 nm和600 nm处出现拐点,在600 nm之后折射率随着波长的增大而逐渐减小。当氧分压为30%时,折射率曲线在500 nm和600 nm处出现拐点,在600 nm后折射率趋于稳定。当氧分压为50%时,折射率曲线在525 nm处出现拐点,之后折射率随波长的增大而逐渐增大。在450~550 nm波段内,AlCoCrCu_（0.5）NiFe氧化物薄膜的吸收系数随氧分压的增加而增加。在550~850 nm波段内,薄膜的吸收系数随工作气压的变化趋势不明显。随着氧分压的增加膜的颜色逐渐变深。经过退火处理后,膜的颜色进一步加深。在相同工艺参数的情况下,氧的分压增加,膜厚减小。结论适当减小氧分压,能获得具有高折射率的AlCoCrCu_（0.5）NiFe氧化物薄膜。不同的分压下,AlCoCrCu_（0.5）FeNi氧化物薄膜的吸收系数随波长的增加均存在一个拐点,并且随氧分压的增加,拐点的波长减小。氧含量增加导致氧化物薄膜厚度减小,颜色加深。
Objective To synthesize the oxide films of AlCoCrCu_（0.5）NiFe high-entropy alloy and characterize their optical properties. Methods The sputtered oxide films of AlCoCrCu_（0.5）NiFe high-entropy alloy were deposited on the silicon wafer and glass using radio frequency sputter system,and were subsequently annealed. Ellipsometer was employed to analyze thickness,refractive index（ n） and absorption index（ k）. Results The refractive index n decreased with the oxygen concentration. When the wavelength was633 nm,n varied between 1. 69 and 2. 40. At the oxygen concentration of 10%,the curve of refractive index had inflection points at the wavelengths of both 475 nm and 600 nm. After 600 nm,n value decreased with the increase of wavelength. At 30% oxygen,the curve of refractive index had inflection points at 500 nm and 600 nm. After that,the change of n value was minor. At 50% oxygen,there was an inflection point on the refractive-index curve at the wavelength of 525 nm. After that,n value increased with the increase of wavelength. The absorption index of AlCoCrCu_（0.5）NiFe oxide film increased with the increase of oxygen concentration in the wavelength of between 450 nm and 550 nm. k value changed less obviously between 550 nm and 850 nm wavelengths. The film color became deeper with the increase of oxygen concentration. After the film was annealed at different temperatures,the film color became even deeper. The film thickness decreased with the increase of the oxygen concentration. Conclusion Decreasing oxygen concentration resulted in oxide films of AlCoCrCu_（0.5）NiFe high-entropy alloy with high refractive index. There was an inflection point in the absorption index curves of different oxygen concentrations. With oxygen concentration increasing,the wavelength value of the inflection point decreased,the film thickness increased,and the film color became deeper.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2016年第2期129-133,共5页
Surface Technology
基金
广东省科技计划项目(2012B010200047)
广东省自然科学基金项目(2014A030313784)
江门市科技计划项目(2014-2016)~~
关键词
高熵合金
氧化物
薄膜
折射率
吸收系数
膜厚
high-entropy alloy
oxide
film
refractive index
absorption index
film thickness
