摘要
为了克服激光沿原光路返回产生激光回馈效应的影响,提出了一种以组合三反射镜为目标载体的三自由度测量方法,即三平面镜组合方法.它不同于平面镜或角隅棱镜作为目标镜的方法,既能使反射光线与原光线错开一定距离,保证反射光不会沿原光路返回,又能使反射光线保留目标测量对象的偏转信息.在实际测量过程中,一方面由于测量位移范围较小,测量光束与参考光束在测量过程中错开很小,不会影响干涉条纹的产生.另一方面考虑工作台偏转角度一般很小,对干涉条纹形状的影响不会造成对干涉条纹计数的破坏.实验应用结果表明,该方法适用于运动位移与偏转角度的三自由度同步测量.
In order to prevent the laser from turning back to the original optical path,which may result in the feedback effect of laser,this paper presents a measurement method of three degrees of freedom based on three combined mirrors as the target carrier.This system also known as three-mirror combination method.Unlike those conventional method of using a mirror or a corner cube mirror as the target,the three-mirror method can shifted outgoing light to the incident light at a distance and keep the deflection information of outgoing light on the measurement target.On the one hand,in the process of the measurement,there is a small staggered distance between the measuring beam and the reference beam during actual measurement due to a relatively narrow measuring range of displacement,which would not affect the generation of interference fringes;on the other hand,considering the small deflecting angle of the workbench,the influence on the shapes of interference fringes would not do damage to their counting.This method is suitable for simultaneous measurement in multi-degree of freedom of displacement and deflection angle.
出处
《武汉大学学报（工学版）》
CAS
CSCD
北大核心
2016年第1期132-136,共5页
Engineering Journal of Wuhan University
关键词
激光干涉
三自由度
位移与角度测量
条纹计数
laser interferometer
three degrees of freedom
displacement and angle measurement
fringe counting
