摘要
在微电子技术高速发展的大潮中,MEMS(Microelectro-mechanical systems)传感器也得到广泛应用。首先,文章简单介绍MEMS传感器的概念、特点、典型代表。其次,举例阐述其在国内外的最新研究进展、产品及应用情况,包括基本原理、实现功能的先进性。最后,从无源化、材料多样化、微型化等方面对MEMS传感器的发展方向进行展望。
With the high-speed development of micro electronic technique,the MEMS sensors wins widespread use right now. Firstly,the concept,characteristics and typical examples are introduced brief ly.Then,the paper makes some examples to describe the research and application situation of MEMS sensors,including its rationale,advancements.Finally,development trends of MEMS sensors are predicted in terms of passivity,diversification of material and micromation.
出处
《无线互联科技》
2016年第3期95-96,共2页
Wireless Internet Technology
关键词
微电子机械系统
传感器
应用
MEMS sensor
microelectro-mechanical systems
application
