摘要
针对真空吸附释放微尺度对象困难的问题,采用真空吸附拾取与基底施加振动的双作用方法来释放微尺度对象,以达到提高释放成功率和释放精度的目的。由理论分析可知,微尺度对象成功释放与摩擦力和黏着力有关。通过实验研究发现:当振动输入信号的频率增加时,振动释放的成功率变化不大,而其释放精度增加;当振动输入信号的幅值增加时,振动释放的成功率增加,释放精度也相应提高;当微尺度对象的直径减小时,振动释放的成功率降低,释放精度也相应降低。从而证明,振动输入信号的频率、幅值以及微尺度对象尺寸的变化与振动释放的成功率和精度密切相关。
Owing to the fact that it is difficult to directly release micro objects by means of vacuum adsorption manipulation,the new manipulation method,which is based on the vacuum adsorption pick and vibrational release of the substrate,is proposed in order to increase the release rate of success and the release precision for the micro objects.According to theory analysis,it is known that the release rate of success of micro objects is related to the adhesion force between the manipulation tool and micro objects and the friction force between the substrate and objects.The results obtained from the experiment research are summarized as follows：the release rate of success of the micro objects is hardly changed,but the release precision is greatly increased when the frequency of the vibration signal is increased;the release rate of success and the precision of the micro objects are enhanced when the amplification of the vibration signal increases;the release rate of success and the precision of the micro objects are dropped as the diameter of the micro objects is reduced.Consequently,it is demonstrated that the release precision and release rate of success of the micro objects in the new manipulation method are closely related to the frequency and amplification of the vibration signal and the diameter of the micro objects.
出处
《微纳电子技术》
北大核心
2016年第3期177-182,共6页
Micronanoelectronic Technology
基金
内蒙古自然科学基金资助项目(2012MS0730)
江苏省自然科学基金资助项目(BK20130325)
