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阴极弧离子镀TiAlSiN涂层表面-界面能谱分析与结合强度 被引量:5

Energy spectrum analysis and bonding strength of TiAlSiN coating by cathodic arc ion plating
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摘要 采用阴极弧离子镀法在H13钢表面制备Ti Al Si N涂层,通过SEM对Ti Al Si N涂层表面和界面形貌进行了观察,通过EDS和XRD对其化学元素和物相进行了分析,利用划痕法测定了其结合强度,并对其界面结合机理进行了探讨。结果表明:Ti Al Si N涂层表面主要成分为Ti、Al、Si和N元素,各元素分布均匀,未产生富集现象;高硬度的Ti Al N是由Al原子以置换方式取代Ti N中部分Ti原子生成的,且Ti N和Al N晶粒得到细化,形成较为致密的结构,使涂层硬度得到了提高;Ti、Al、Si、N等原子在结合界面处发生相互扩散,是形成冶金结合的主要机制;Ti Al SN涂层/H13钢体系具有较好的结合强度,用划痕法测得涂层界面结合强度为44 N。 A Ti Al Si N coating was deposited on surface of H13 steel by cathodic arc ion plating. The surface-interface morphology,chemical elements and phase composition of the coatings were analyzed by means of scanning electron microscope( SEM),energy dispersive spectrometer( EDS) and X-ray diffraction( XRD),respectively. Scratch test was used to investigate the adhesion strength of the coating. The mechanism of interfacial combination of the coating was discussed. The results show that the main components on the surface of Ti Al Si N coating are Ti,Al,Si and N elements,and the plane scanning shows that the chemical elements on the surface are distributed evenly and do not produce the enrichment phenomena. The Ti Al N is formed by part of Ti atom in the Ti N is replaced by Al atom,the grains of Ti N and Al N are refined by Si element,and the structure of coating become more compact,the hardness of the coating is improved. Ti,Al,Si and N elements diffuse in the interface,which is the main mechanism of metallurgical bonding. The interface between Ti Al SN and H13 steel has a good bonding,and the bonding strength of the coating is 44 N by scratch test.
出处 《材料热处理学报》 EI CAS CSCD 北大核心 2016年第3期166-170,共5页 Transactions of Materials and Heat Treatment
基金 江苏省科技支撑计划(工业)(BE2014818)
关键词 阴极弧离子镀 TiAlSiN涂层 面扫描 线扫描 结合强度 cathodic arc ion plating Ti Al Si N coating line scan plane scan bonding strength
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参考文献16

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