摘要
通过离子束溅射沉积法制备了受不同张应力作用的TbDy-Fe稀土超磁致伸缩薄膜样品。借助LK-G150激光微位移传感器和交变梯度磁强计分别测试薄膜的悬臂梁自由端偏转量与磁滞回线,通过微磁学模拟软件OOMMF模拟计算不同张应力作用下薄膜的磁性能;研究张应力对薄膜磁致伸缩性能及软磁性能的影响。结果表明:张应力能显著提高薄膜的低场磁敏性,但其饱和磁致伸缩性能有所降低;模拟计算结果与实验结果均表明:随着薄膜所受张应力的增加,薄膜的矫顽力逐渐减小,软磁性能得到了改善。
The effect of the tensile stress on the magnetostriction and soft magnetic properties of the TbDy-Fe rare-earth giant magnetostrictive thin film（ RGMF）,synthesized by ion beam sputtering deposition（ IBSD）,was experimentally investigated by measurement of cantilever deflection and hysteresis loop with LK-G150 laser micro-displacement sensor and alternating gradient magnetometer; mathematically modeled,theoretically analyzed and numerically simulated with software OOMMF. The simulated results show that the tensile stress significantly improves the magnetstrictive sensitivity of the TbDy-Fe RGMF at a low magnetic field,but slightly reduces the saturated magnetostrictive sensitivity. To be specific,as the tensile stress increases,the coercive force of the TbDy-Fe RGMF decreases,accompanied by an improvement of the magnetostrictive sensitivity at a low magnetic field. The simulated and measured results were found to be in fairly good agreement.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第3期372-376,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(11104031)
