摘要
为了高精度测量被测物体表面3维轮廓,采用半导体激光器波数扫描干涉的方法,对激光波数扫描干涉进行了理论分析和实验验证。在迈克尔逊干涉系统的参考端引入一个光楔,通过2-D傅里叶变换提取光楔干涉图像的相位,在线检测激光器输出波数变化,最后对所有时间分辨干涉图像序列进行随机采样傅里叶变换,还原被测物体表面3维轮廓。结果表明,轮廓测量精度达到±6.7nm。该方法特别适合于机械零件的质量检验。
In order to measure 3-D profile of a sample with high accuracy , wavenumber-scanning interferometry was used . An optical wedge was used as reference terminal of a Michelson interferometer system .The phases of wedge interference image were extracted by 2-D Fourier transform.The changes of output wavenumber were detected on line .Finally, all the time-resolved interferometry image sequences were sampled by Fourier transform random .The 3-D contour of object surface was restored with high precision.The profile of a sample object was constructed with the resolution of ±6.7nm.The proposed method is particularly suitable for quality inspection of mechanical parts .
出处
《激光技术》
CAS
CSCD
北大核心
2016年第3期392-396,共5页
Laser Technology
基金
国家自然科学基金资助项目(51371129
11174226)
广东省自然科学基金资助项目(1414050002003)
广州市科技计划资助项目(2014J4100203)
关键词
激光技术
轮廓测量
波数扫描
半导体激光器
随机采样傅里叶变换
laser technique
profile measurement
wavenumber scanning
diode laser
random sampling Fourier transform
