摘要
准连续紫外激光器在精密材料微加工、紫外固化、光刻蚀等领域有广泛的应用,目前,国内高功率准连续紫外激光器的研制尚处于起步阶段,在激光功率稳定、光束质量等方面存在挑战.设计了一套基于腔内倍频的准连续紫外激光器,以808nm半导体泵浦Nd：YVO4晶体LBO紫外激光器,实现了波长为355nm的25~50kHz准连续紫外激光输出,激光器最高功率达3.48W,热效应得到了有效控制,光束质量较好.该研究结果将助于紫外高功率准连续激光器的商业化开发及应用.
Quasi-CW ultraviolet laser has widely used in micromachinging, UV CURING and light etching. In our country, Development of continuous-high power ultraviolet laser is still in the starting stage at present, a challenge to Laser power stability and beam quality,etc.This paper designs a set of quasi-CW ultraviolet laser based on Intracavity Frequency Doubling, 808nm Semiconductor Laser pumped Nd;YVO4 Crystal Ultraviolet Laser with LBO Frequency Tripling,the output wavelength is 355nm within 25~50kHz and the peak power is 3.48W,effective control of thermal effect, laser beam quality is better. The research results would make for the commercialization and application of the quasi-CW ultraviolet laser.
出处
《长春理工大学学报（自然科学版）》
2016年第2期19-21,共3页
Journal of Changchun University of Science and Technology(Natural Science Edition)
关键词
准连续紫外激光器
高功率
腔内倍频
Quasi-CW ultraviolet laser
high power
intracavity-frequency-doubling
