摘要
气液固(VLS)生长是一维纳米晶材料生长最常见的方法。通过电子束加热蒸发氧化铟锡薄膜,在缺氧状态下生长出无序纳米晶的表面形态,粗糙度达到了几十至上百纳米。分析其生长机理,是氧化物源在电子束高温下熔融分解金属,遇冷凝结成金属液滴,作为VLS生长的金属催化剂使其结晶出纳米晶须。
One-dimensional nanomaterials are often fabricated by means of VLS growth mechanism. Disordered nannrod indium tin oxide fihn is prepared by the E-beam heating evaporation in anaerobic condition.its rooghness is over several hundred nanometer.The growth mechanism of indium tin oxide film is described ： First, the source of indium tin oxide is decomposed into vapor at high temperature by E-beam heating.second,the vapor can condense into metal droplets on the cold substrate.As the catalayst of VLS model,indium tin oxide crystal wiskers are grown.
出处
《齐鲁工业大学学报》
2016年第1期42-44,共3页
Journal of Qilu University of Technology
基金
国家"863"项目(2015AA03302)
关键词
氧化铟锡
纳米晶须
气液固生长
电子束蒸发
indium tin oxide
nanometer wiskers
vapor liquid solid growth
electron beam evaporation
