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A novel sub 20 nm single gate tunnel field effect transistor with intrinsic channel for ultra low power applications 被引量:1

A novel sub 20 nm single gate tunnel field effect transistor with intrinsic channel for ultra low power applications
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摘要 We propose a nanoscale single gate ultra thin body intrinsic channel tunnel field effect transistor using the charge plasma concept for ultra low power applications. The characteristics of TFETs (having low leakage) are improved by junctionless TFETs through blending advantages of Junctionless FETs (with high on current). We further improved the characteristics, simultaneously simplifying the structure at a very low power rating using an InAs channel. We found that the proposed device structure has reduced short channel effects and parasitics and provides high speed operation even at a very low supply voltage with low leakage. Simulations resulted in Iovv of - 9 × 10-16A/um, IoN of ,-20uA/um, ION/IoFF of--2× 1010, threshold voltage of 0.057 V, subthreshold slope of 7 mV/dec and DIBL of 86 mV/V for PolyGate/HfO2/InAs TFET at a temperature of 300 K, gate length of 20 nm, oxide thickness of 2 nm, film thickness of 10 nm, low-k spacer thickness of 10 nm and VDD of 0.2 V. We propose a nanoscale single gate ultra thin body intrinsic channel tunnel field effect transistor using the charge plasma concept for ultra low power applications. The characteristics of TFETs (having low leakage) are improved by junctionless TFETs through blending advantages of Junctionless FETs (with high on current). We further improved the characteristics, simultaneously simplifying the structure at a very low power rating using an InAs channel. We found that the proposed device structure has reduced short channel effects and parasitics and provides high speed operation even at a very low supply voltage with low leakage. Simulations resulted in Iovv of - 9 × 10-16A/um, IoN of ,-20uA/um, ION/IoFF of--2× 1010, threshold voltage of 0.057 V, subthreshold slope of 7 mV/dec and DIBL of 86 mV/V for PolyGate/HfO2/InAs TFET at a temperature of 300 K, gate length of 20 nm, oxide thickness of 2 nm, film thickness of 10 nm, low-k spacer thickness of 10 nm and VDD of 0.2 V.
出处 《Journal of Semiconductors》 EI CAS CSCD 2016年第5期30-34,共5页 半导体学报(英文版)
关键词 band-to-band tunneling (BTBT) tunnel field effect transistor (TFET) junctionless tunnel field effecttransistor (JLTFET) ION/IOFF ratio low power band-to-band tunneling (BTBT) tunnel field effect transistor (TFET) junctionless tunnel field effecttransistor (JLTFET) ION/IOFF ratio low power
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