摘要
为了提高药品包衣厚度测量的准确性,设计了一套晶振片夹具,可实现多方位测量。运用"等效密度法"建立起夹具和晶振片的有限元模型,分析不同夹具宽度对晶振片谐振频率的影响。通过有限元分析,发现夹具宽度对晶振片低阶模态下的谐振频率有较大影响,但随着模态阶数的增大,其影响程度随之下降。搭建实验系统对夹具影响程度进行验证,该夹具对晶振片厚度剪切的高阶振动频率基本无影响,符合包衣厚度测量系统的要求。
In this paper, to improve the accuracy of thickness measurement, the jig for fixing the quartz crystal resonator was designed to measure the thickness in multi - directions. The jig and the resonator were modelled for finite element analysis by Equivalent Density Method, and the relationship between the dimensions of jig and the frequency of resonator were analyzed with the model. The results of FEM show the dimensions of the jig have a great influence on low - order modal frequency of the resonator but hardly influence on high - order modal. Finally, the prototype system for experiment was employed to test the influence of the jig. The jig shows no effect on high order vibration frequency of the crystal thickness shear, so it can be used in the system for measuring the coating thickness.
出处
《重庆科技学院学报（自然科学版）》
CAS
2016年第4期81-84,共4页
Journal of Chongqing University of Science and Technology：Natural Sciences Edition
基金
重庆市基础与前沿研究计划项目"复杂工况下薄膜生成厚度实时测量方法研究"(CSTC2013JCYJA70005)
关键词
石英晶体谐振器
薄膜厚度
夹具
有限元法
Quartz crystal resonator
thin -film thickness
jig
finite element method
