摘要
针对高加速度高精度定位气浮平台对气浮导轨高刚度高承载能力的要求,采用二维线性插值和有限元法推导平面气浮空气轴承的静态性能公式,利用数学软件MATLAB编写有限元程序计算气浮导轨的静态性能并分析相关参数对静态性能的影响。有限元分析结果表明:当气浮平台中节流孔之间的排距与气浮面宽度的比值为一定值、气浮厚度为另一定值时,气浮平台的角刚度和承载能力得到较优值。研究结果为气浮导轨的静态性能优化提供了理论参考,为气浮平台的结构优化提供了方向。
Aiming at high speed and high precision positioning on the bearing capacity of the floating guide high stiffness requirements,it uses two-dimensional linear interpolation and finite element method to derive the static performance formula for plane floating air bearing and compiles the calculation program for the optimal design parameters with software MATLAB.It obtains the static performance of the aerostatic stage and the influence of the relevant parameter on the static performance.The analysis results conclude that the angular stiffness and the load capacity of the aerostatic stage can be further improved when the ratio of row distance is determined.The result can be reference for the optimization of the guideway and provide direction for the optimization of the aerostatic stage.
出处
《机械设计与制造工程》
2016年第7期65-69,共5页
Machine Design and Manufacturing Engineering
关键词
气浮导轨
承载力
有限元编程
air floating guide
bearing capacity
finite element programming
