摘要
随着电子工业的迅速发展,高纯八氟丙烷电子气体的需求量日益增加。总结了八氟丙烷的纯化方法,包括精馏法、吸附法、杂质转化法和膜分离法,并对各方法的优缺点进行了分析和讨论。
With the rapid development of electronic industry,the demand of electronic grade octafluoropropane is increasing dramatically.The methods for the purification of octafluoropropane were summarized,including distillation,adsorption,impurity conversion and membrane separation,and their characteristics and differences were analyzed and discussed.
出处
《化工新型材料》
CAS
CSCD
北大核心
2016年第9期30-32,共3页
New Chemical Materials
基金
国家科技重大专项(2013ZX02401106)
关键词
八氟丙烷
纯化
电子气体
octafluoropropane
purification
electronic gas
