摘要
为了开展多工况条件下的氙气质量流量精确校准,研制了氙气质量流量校准装置。本文介绍了校准装置的组成、校准原理,测试了极限真空度、漏放气率,进行了真空容器容积在线测量、校准过程中氙气温度变化及物态变化等研究,对校准结果进行了验证。该装置校准范围为(3×10^(-1)~2.6×10~3)m L/min(标准状态),相对合成标准不确定度为1.6%。
A novel type of the calibration tool has been successfully developed to accurately calibrate xenon gas mass flow in a variety of xenon gas applications. The operation principle of the calibrator was discussed. The newly-developed calibrator mainly consisted of four units,including the high purity Xe source,volume measurement unit,calibration unit and pumping unit. The influence of the calibration conditions,including but not limited to the low ultimate pressure,leakage and outgassing rates,temperature and properties of Xe gas,on the precision of the calibration of Xe mass flow was experimentally investigated. The calibrated results show that the novel Xe mass flow calibrator does a good job. To be specific,the calibration was in the 3 × 10^-1 to 2. 6 × 10^3 m L / min range and the relative combined standard uncertainty was below 1. 6 %.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第9期995-998,共4页
Chinese Journal of Vacuum Science and Technology
关键词
计量
质量流量
校准装置
氙气
Metrology
Mass flow
Calibration apparatus
Xenon
