摘要
介绍了一种结构简单的熔接式全石英光纤非本征型法布里-珀罗干涉仪（EFPI）高静压传感器，对传感器的压力效应进行了理论分析，给出了传感器的设计结构和制作过程。和传统EFPI传感器相比，该传感器具有长腔长、结构简单、制作工艺简易、应用灵活方便等优点，可以用于较高静态压力的测量。建立了传感解调系统，对压力进行了测试，测量精确度高，稳定性好。同时进行了温度敏感度测量实验，温度敏感系数约为0．72nm／℃，传感器的腔长温度线性度好，结果显示传感器温度交叉敏感度低。在0～20MPa压力测量范围内，该传感器的压力腔长灵敏度可以达到21nm／MPa，连续10h动态测量条件下，测量偏差为0．2％FS。
All-silica fiber extrinsic Fabry-Perot interferometer （EFPI） high static pressure sensor in fusion with simple structure is introduced. The pressure effect of the sensor is theoretically analyzed, and the design structure and manufacturing process of the sensor are given. The sensor has some advantages such as long cavity length, simple structure, simple manufacturing process, convenience and flexibility in application comparing with traditional EFPI sensor, while it can be used in the measurement of higher static pressure. Sensing demodulation system is set up to conduct a pressure test. The results show that the system has high measuring precision and good stability. Meanwhile ,the temperature sensitivity measuring experiment is conducted. Temperature sensibility coefficient is about 0.72 nm/℃ and the cavity length-temperature has good linearity. The results show that the sensor has a low temperature crossing sensitivity. In specific pressure of 0~20 MPa, pressure cavity length sensitivity of the sensor can reach 21 nm/MPa. Measuring deviation is 0.2%FS with continuous dynamic measurement of 10 h.
作者
张杰
荆振国
李昂
彭伟
Zhang Jie Jing Zhenguo Li Ang Peng Wei(School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian, Liaoning 116024, China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2016年第10期224-230,共7页
Chinese Journal of Lasers
基金
国家自然科学基金(61137005
11474043)
中央高校基本科研业务费专项资金(DUT16TD17)
