摘要
为了快速准确检测矿井中的甲烷气体浓度,以直接沉淀法制备了不同含量Ce O2的CeO_2-Co_3O_4纳米晶粒。利用掩膜法将制备的CeO_2-Co_3O_4纳米晶粒镀膜于氧化硅绝缘层表面形成敏感薄膜,采用标准MEMS工艺制作了一种薄膜型甲烷传感器。采用X射线衍射仪表征了CeO_2-Co_3O_4纳米晶粒的相组成和微观形貌,利用全自动程序化学吸附仪分析了CeO_2-Co_3O_4纳米晶粒对甲烷的吸附机理。在气体传感器静态测试系统上,测试了甲烷传感器灵敏度、湿度、温度、动态响应、抗干扰和长期稳定性等特性。结果表明:以Ce_30为敏感薄膜的甲烷传感器灵敏度为98.3%,动态响应时间为11 s,恢复时间为8 s。在矿井中连续使用12个月后,灵敏度衰减了8.5%。表明该甲烷传感器可实现矿井中甲烷气体在线检测。
In order to detect methane concentration in mine quickly and accurately, CeO2-Co3O4 nanocrystalline were pre- pared by direct precipitation method.CeO2-Co3O4 nanocrystalline was deposited onto the insulating layer of silicon oxide surface by mask method.A new film-type methane gas sensor was designed by micro electro mechanical system.The crystalline phase and microstrueture of CeO2-Co3O4 nanocrystalline were displayed using X-ray diffraction （XRD） and field emission scanning electron microscope （FE-SEM）, methane adsorption mechanism of CeO2-Co3O4 nanoerystalline were analyzed by automatic program chemisorption analyzer.These characteristic tests of methane gas sensors were carried out on the traits of sensitive performance, temperature, relative humidity, dynamic response, interference and long-term stability in gas sensor static test system.The conclusion demonstrates that the sensitivity of methane gas sensor based on Ce30 sensitive thin film was 98.3%, the dynamic response time and recover time of methane gas sensor were 11 s and 8 s respectively.The sensitivity of methane gas sensor was attenuated about 8.5% ,when methane gas sensor was applied continually in the mine about 12 months.These are ensured that methane gas sensor based on Ce30 sensitive thin film is ideal to detect methane concentration in mine quickly and accurately.
出处
《仪表技术与传感器》
CSCD
北大核心
2016年第11期10-13,18,共5页
Instrument Technique and Sensor
基金
河南省高等学校重点科研项目(15A470006)
关键词
直接沉淀法
纳米晶粒
敏感薄膜
甲烷传感器
灵敏度
direct precipitation method
nanocrystalline
sensitive thin film
methane gas sensor
sensitivity
