摘要
研究了高功率激光系统主要非金属材料硅橡胶的放气特性,采用静态定容升压法测量了硅橡胶和80℃4 h热真空预处理后硅橡胶的放气率,利用四极质谱计检测和定性分析了热真空预处理前、后硅橡胶放出气体的成分;结果表明,热真空预处理前、后硅橡胶的放气率分别为2.69×10^(-7)和6.47×10^(-8)Pam^3/s·cm^2,在真空环境下均释放了可凝挥发物;研究表明,80℃4h热真空预处理后硅橡胶的放气率和可凝挥发物释放量降低至未经热真空预处理的硅橡胶的1/4,且放气率低于1×10^(-7)Pam^3/s·cm^2,适合作为高功率激光系统的非金属材料。本文还讨论了降低高功率激光系统硅橡胶放气率和可凝挥发物释放量的方法。
We experimentally addressed the outgassing properties of the silicone rubber,an important non-metallic materialin high-power laser system and a major contamination source of the optics. The influence of the baking conditions,such as the pressure,baking temperature and time,on the outgassing rate and outgassing compositions was investigated in constant volume method and with quadrupole mass spectrometer. The results show that the baking at 80℃ for 4h easily decreased the outgassing rate of silicone rubber from 2. 69 × 10^-7down to 6. 47 × 10^-8Pam^3/ s·cm^2,and reduced the release of condensable volatile matter from silicone rubber by 75%. Baked at 80℃for 4 h,the silicone rubber has an outgassing rate lower than 1 × 10^-7Pam^3/ s·cm^2. We suggest that the silicon rubber baked under the optimized conditions may be a good material for fabrication of the high power laser system.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第11期1306-1310,共5页
Chinese Journal of Vacuum Science and Technology
基金
中国工程物理研究院国防预研项目
关键词
高功率激光系统
非金属材料
放气率
可凝挥发物
High power laser system
Non-metallic material
Outgassing rate
Condensable volatile matter
