摘要
A single-axis normal-tracking measurement system is proposed, which can solve the problem of measuring large curved surface. According to Collins formula, the tilt dependent error of the measurement system is studied, which uses Gaussian beam as the light source. By theoretical analysis and numerical simulation, the influence of the error is presented. The results show that there is the difference between point source and Gaussian beam for differential confocal microscopy. The opti-mal diameter of pinhole can be determined by the mathematical model and the actual parameters of the measurement system. The optimal pinhole diameter of this measurement system is 20 to 35 pm for 633 nm wavelength light source.
基金
Quantity Dissemination and Quality Safety Project of AQSIQ(No.ALC1501)
National Key Scientific Instrument and Equipment Development Projects,China(No.2013YQ170539)
