摘要
转子是分子泵的关键部件,其结构参数的设计需要从抽气性能、转子动力学和强度等方面综合考虑,经过多次迭代才能满足要求,设计过程很复杂。本文采用多学科设计优化理念,基于优化总控软件平台,开发了应用接口软件,集成UG NX、ANSYS、MATLAB等软件,实现抽气性能计算、参数化几何建模、转子动态特性分析、应力与应变计算等功能模块的数据共享和优化迭代,对转子的结构参数进行自动优化,得到了优化的转子结构参数,为高质量、高效率开发系列化分子泵产品提供了技术支撑。
Rotor is a critical component for molecular pump. The design of rotor structural parameters is quite complicated with considering the multi-iteration of pumping character, rotor dynamics, rotor mechanical strength etc. A novel interface software was developed based on an optimization platform with integrating UG NX, ANSYS and Mat Lab.To achieve the automatic optimization of rotor structural parameters, data sharing and iterative optimization of functional modules of pumping character calculation,parametric geometry model, dynamic characteristic analysis and stress- strain calculation were accomplished. Reference was provided for the design of high quality and efficient turbo-molecular pump.
作者
陶继忠
吴祉群
何朝晖
王晓冬
TAO Ji-zhong WU Zhi-qun HE Zhao-hui WANG Xiao-dong(Institute of Mechanical Manufacturing Technology of CAEP, Mianyang 621900, China School of Mechanical Engineering ＆ Automation, Northeastern University, Shenyang 110819, china)
出处
《真空》
CAS
2016年第6期1-4,共4页
Vacuum
基金
国家重大科学仪器设备开发专项资金资助(编号2013YQ130429)
关键词
涡轮分子泵
转子设计
多学科设计优化
turbo-molecular pump
rotor design
multidisciplinary design optimization
