摘要
为了测定感光材料的光谱灵敏度,通过Code V、Solid Works软件优化设计了一套感光材料光谱灵敏度测定曝光系统。分析比较了在不同入射角、不同光栅线数情况下系统光路结构的差异,确定入射角25°、光栅线数为350 L/mm是系统的最优设计。实验结果表明,设计的曝光系统能够产生一个宽201.5 mm,高80 mm,覆盖360nm?900 nm光波长的矩形光谱,经过一个18等级台阶的灰度片使得光谱功率能在0.52 m W?10.65 m W之间进行调节,光谱分辨率能够达到0.021 nm,满足曝光系统的设计要求。
To measure the spectral sensitivity of the photosensitive material, an exposure system for the spectral sensitivity detection of the photosensitive material is designed by use of commercial software of Code V and SolidWorks. The structural differences of the optical path are analyzed using line density of grating under diverse incident angle. The analysis result is that the incident angle of 25＆#176; and line density of 350 L/mm are optimum parameters of the exposure system. The experimental result in the system shows that the rectangular spectra of the size of 201.5 mm？ 80 mm can be achieved, the wavelengths cover the range of 360 nm？900 nm, the intensity of spectra can be adjusted in the range of 0.52 mW？10.65 mW when an 18 gray scale level of slices are inserted in the exposure system, and the resolution of spectra is 0.021 nm, which satisfies the requirement of the exposure system.
出处
《光电工程》
CAS
CSCD
北大核心
2016年第12期72-78,共7页
Opto-Electronic Engineering
基金
国家重点基础研究发展计划(973计划)(2015cb352001)
国家重大科学仪器设备开发专项(2015CB352001)
上海市科学仪器重点项目(14142200902)
国家自然科学基金(61378060
61205156)
关键词
光谱测量
光谱灵敏度
光栅
光谱功率
分辨率
spectral measurement
spectral sensitivity
grating
spectral power
resolution
