摘要
对飞秒激光诱导银纳米布线的加工精度进行研究,并将其应用于微纳器件的加工领域。对飞秒激光与银离子前驱体溶液的相互作用进行了实验,通过对飞秒激光功率、曝光时间、前驱体溶液中表面活性剂种类以及浓度的调控,利用扫描电子显微镜对布线结构进行表征,得到140nm宽的银纳米线。利用飞秒激光制备出一组银微纳图案和微型催化反应器。该研究为银微纳结构图案制备以及复杂衬底上金属功能器件集成提供了新的技术。
We carried out a research on the precision of femtosecond laser induced silver nanowiring and its application in micro-device integration. The precision of the silver nanowires could be controlled by the laser power, exposure duration, surfactant type and their concentrations in the precursor solution. An experiment of interaction between femtosecond laser and Ag precursor solution was conducted. Experimental results show that silver nanowires with high precision （140 nm） could be prepared, which was confirmed by means of scanning electron microscope. Meanwhile, a micro-pattern of silver nanowires and a micro-catalytic-reactor were produced by femtosecond laser direct writing technique. The research may open up a new way to the designable patterning of silver mierostruetures toward flexible fabrication and integration of silver functional devices.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2017年第1期81-85,共5页
Chinese Journal of Lasers
基金
国家自然科学基金(61522503
61376123)
关键词
激光加工技术
银纳米布线
飞秒激光
图案化
laser manufacturing
laser materials processing
silver nanowiring
femtosecond laser
patterning
