摘要
在对各种有害气体检测的研究领域内,纳米半导体金属氧化物气敏传感器有着十分重要的地位。作为一种n型半导体金属氧化物,氧化钨因其独有的结构和性能特点,成为近年来气敏材料的研究重点和热点。本文简单介绍氧化钨系气敏材料的气敏响应机理,总结近年来改良和提高纳米氧化钨材料气敏性能的主要工艺和方向,最后指出其自身的不足及未来的研究发展方向。
In the research field of noxious gas detection,semiconductor metal oxides nano-material gas sensors occupy a very important position. Tungsten oxide, as a kind of n-type semiconductor, because of its unique structure and characteristics, the study of tungsten oxide became one of the research focus and hotspot of gas sensors in recent years. The gas sensing mechanism of tungsten oxide is simply introduced, and the process and trend of improving the gas sensing performance of tungsten oxide in recent years are summarized, this review also points out the shortcomings and future development direction of tungsten oxide.
出处
《现代制造技术与装备》
2016年第12期23-26,共4页
Modern Manufacturing Technology and Equipment
基金
国家自然科学基金(21677095)
