摘要
通过菲佐型干涉系统、直角圆锥反射镜的一次性测量,可获得圆柱形光学元件整周的面形信息。为实现高精度的面形测量,实验装置的校准至关重要,但由于调整机构的缺陷导致圆锥反射镜和被测圆柱的空间方位难以确定,距离理想位置的任何位置偏差将给测量结果引入严重的测量误差。为去除该系统误差,要明确各种失调误差的形成原因,分析其对测量结果的影响。通过圆柱坐标系下数学模型的建立,推导出偏移误差和旋转误差的变化公式,并通过Matlab数值模拟和实际测量对其进行验证。结果表明,利用误差计算公式可以推导出失调误差系数,便于进一步的系统误差校正。
Information of the entire cylindrical inner surfaces can be achieved by using a Fizeau interference system and a 90° conical mirror in a one-time measurement. In order to achieve high-precision surface measurement, the alignment of experimental apparatus is very crucial, However, defects of the alignment may cause the spatial orientation of the cone mirror and the tested cylinder difficult to determine, and any misplacement from ideal location may result in large measurement errors. Therefore, to remove the system errors, the reasons of all kinds of misalignment should be well understood and their influences on the measurement results should be analyzed. By establishing the mathematical model in cylindrical coordinate, the change formula of offset error and rotational error is deduced. The formula is verified by numerical simulation of Matlab software and practical measurement. The results show that the misalignment error coefficient can be successfully derived with the proposed formula, which will further benefit system error correction.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2017年第1期173-180,共8页
Acta Optica Sinica
基金
国家科技重大专项(2013YQ150829)
上海市科研计划项目(14140502500)
苏州市纳米专项(ZXG2013034)
关键词
测量
菲佐干涉测量
360°柱面
圆锥镜
失调误差
measurement
Fizeau interferometric measurement
360° cylindrical surface
conical mirror
misalignment errors
