摘要
为了降低紫外固化系统光源的热辐射,根据光学薄膜理论,以HfO_2、AlF_3和Cr作为镀膜材料,采用反射与吸收相结合的结构,设计了紫外高反射、可见/近红外高吸收的滤光膜。通过在基底和膜系之间增镀Al膜作为过渡层,提高了薄膜的牢固性。通过优化工艺参数,研制了220~400nm波段平均反射率为90.6%、420~2000nm波段平均吸收率为92.4%的滤光膜。
In order to reduce the heat radiation of ultraviolet （UV） curing system, based on the optical thin-film theory, with HfO2, AlF3 and Cr as coating materials, and by use of the reflection and absorption combined structure, the filter film system with high reflection in the UV band and high absorption in visible-near infrared band is designed. The soundness of the thin film is improved by coating Al film as the transition layer between the substrate and the film system. After the optimization of process parameters, the filter film with average reflectivity of 90.6% in 220-400 nm wave band and average absorptivity of 92.4% in 420-2000 nm wave band is developed.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2017年第3期148-154,共7页
Chinese Journal of Lasers
基金
吉林省重大科技攻关专项(20140203002GX)
贵州省科学技术基金博士基金(黔科合J字[2014]2148
黔教合重大专项字[2014]037)
关键词
薄膜
紫外固化系统
热辐射
过渡层
滤光膜
thin-films
UV curing system
heat radiation
transition layer
filter film
