摘要
进行了基于蓝宝石光纤及晶片的光纤法布里-珀罗(F-P)高温传感器研究。理论仿真分析了传感器温度传感灵敏度及干涉光谱信号质量随蓝宝石晶片厚度变化趋势。结果表明,在信噪比(SNR)为30dB、晶片厚为75μm时,可避免干涉光谱信号波峰干涉级次跳变问题,同时获得3.114nm/℃(1 080℃)的温度传感灵敏度。建立了高温传感器系统,并基于干涉光谱相位分析算法进行解调,实现了130~1 080℃测温范围,测温误差小于±2.45℃,1 080℃下温度传感灵敏度测试值为2.973nm/℃,与理论温度传感灵敏度基本吻合。
This paper presents a high temperature Fabry-Perot sensing system based on the sapphire fiber and sapphire wafer. The trends of temperature sensitivity and interference spectrum signal quality changing with the sapphire wafer thickness are simulated and analyzed. The simulation result shows that it can avoid interference order jump, and the temperature sensitivity can be 3.114 urn/℃ （1 080 ℃ ）when signal-to-noise ratio （SNR） is 30 dB and the wafer thickness is 75 μm. The high temperature sensor system is established and the demodulation method is based on the phase analysis algorithm of interference spectrum. The temperature measurement range from 130 ℃ to 1080 ℃ is achieved. The measuring error is kept within ±2.45 ℃ ,and the temperature sensitivity is 2. 973 nm/℃ at 1080 ℃ which corresponds to the theoretical temperature sensitivity.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2017年第4期347-353,共7页
Journal of Optoelectronics·Laser
基金
国家重大科学仪器设备开发专项(2013YQ030915)
国家“973”计划(2010CB327802)
国家自然科学基金(61227011、61378043、61475114、61505139)
天津市自然科学基金(13JCYBJC16200、16JCQNJC02000)
深圳市科技创新委员会(JCYJ20120831153904083)
中国空间技术研究院CAST创新基金资助项目
