摘要
为了消除环境温度对硅压阻式传感器输出的影响,大幅提升硅压阻式传感器的测量精度,将传感器芯片与热源和测温原件封装在一起,通过控制加热的方式使传感器工作在恒定50℃的环境中,对传感器进行线性标定和测试。结果显示:在-45~45℃环境下,600~1 100 h Pa量程内气压传感器的测量误差小于0.3 h Pa。
Greatly affected by the environment in which the most obvious effect of temperature. In order to eliminate influence of ambient temperature on output of silicon piezoresistive sensor, greatly enhance measurement precision of piezoresistive silicon sensor, sensor chip and heat source and temperature-sensitive components are packaged together, by controlling heating mode, sensor can work in environment of constant 50 ℃ and linear calibration and testing are carried out. At -45-45 ℃ temperature measurement error of air pressure sensor system is less than 0.3 hPa at range of 600-1 100 hPa.
作者
周晓宇
张萌颖
杜利东
赵湛
ZHOU Xiao-yu ZHANG Meng-ying DU Li-dong ZHAO Zhan(State Key Laboratory of Transducer Technology, Institute of Electrics, Chinese Academy of Sciences, Beijing 100190, China University of Chinese Academy of Sciences, Beijing 100080, China)
出处
《传感器与微系统》
CSCD
2017年第4期97-99,共3页
Transducer and Microsystem Technologies
关键词
硅压阻式气压传感器
芯片加热
PID控制
温度补偿
silicon piezoresistive gas pressure sensor
chip heating
PID control
temperature compensation
