摘要
以CH_3COCH_3和H_2为反应气源,采用热丝CVD法在经过两步法和三步法预处理的YG6硬质合金(WC-6wt%Co)基体上沉积金刚石涂层。利用扫描电子显微镜和能谱仪分析检测预处理后的YG6基体的表面形貌和钴含量,通过对比三步法与两步法的预处理结果确定三步法最佳工艺。利用扫描电镜、X射线衍射仪和硬度计检测所得金刚石涂层的表面形貌、结晶性和膜基结合性。结果表明:三步法最佳工艺为先采用酸溶液腐蚀20 s,然后采用碱溶液腐蚀20 min,最后继续用酸溶液腐蚀3 min。三步法预处理后的YG6基体获得的金刚石薄膜生长更加均匀致密,晶粒取向更高,膜基结合性能更好。
Diamond coatings were synthesized on the cemented carbide substrates of WC-6wt% Co pretreated by two-step and three-step pretreatments in CH3COCH3/H2 ambient adopt hot filament chemical vapor deposition. The WC-6wt% Co substrates pretreated were tested by scanning electron microscopy （SEM） and energy dispersive spectrometer （EDS） to analyze the surface morphologies and cobalt content of WC-6wt% Co substrates. The optimum of three-step pretreatment was obtained thorough the comparison of pretreatment results between two-step and three-step pretreatment, surface morphology, crystalline property, adhesion between films and WC-6wt% Co substrates of diamond coatings were analyzed by SEM,X-ray diffraction （XRD） and hardness tester. The results show that, the optimum of three-step pretreatment is corroding the substrate 20 s in the acid solution, and then corroding the substrate 20 rain in alkaline solution, and finally corroding the substrate 3 min in the acid solution. Diamond coating deposited on WC-6wt% Co substrate pretreated by three-step method is more uniform and compact and has better grain-orientation and adhesion property.
出处
《人工晶体学报》
CSCD
北大核心
2017年第4期682-687,共6页
Journal of Synthetic Crystals
基金
国家自然科学基金(51172278)
北京市自然科学基金(15L00025)
北京教委科技成果转化项目(2010-583)
关键词
化学气相沉积
金刚石涂层
表面预处理
工艺优化
硬质合金基体
chemical vapor deposition
diamond coatings
surface pretreatment
process optimization
cemented carbide substrate
