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均光消色散光束整形薄膜器件的研究

Study on Achromatic Uniform Light Beam Shaping Thin Film Devices
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摘要 基于亥姆霍兹-基尔霍夫衍射积分定理,从理论上推导出消色散均光薄膜微结构参量、入射光参数和透射光参数之间的关系。基于此,分析了微结构参量对透射光振幅分布和散射角度的影响。光束通过消色散均光薄膜时,散射光斑具有光强分布均匀、消色散、散射角度可控和散射光型可控等优点。实验制作出结构最大深度为5μm,散射角为8°×7.5°的薄膜样品,散射角的理论计算值与实际测量值误差在±0.5°以内。此薄膜器件适用于照明体系、液晶显示器背光显示、投影系统等。 Based on Helmholtz-Kirchhoff diffraction integral theorem, the relationship among micro-structure parameters, incident light parameters and transmission light parameters of achromatic uniform light thin film are theoretically derived. The influences of micro-structure parameters on transmission light amplitude distribution and scattering angle are analyzed. When light beam passes through the achromatic uniform light thin film, the scattering light spot has many advantages such as uniform light intensity distribution, achromatism, controllable scattering angles and wave shape. The thin film with the maximum depth of 5 μm and scattering angle of 8°×7.5° is fabricated. The error of measured scattering angle and the theoretical angle is within ±0.5°. The designed thin films can be used in illumination, LCD backlight display, projection system as well as other applications.
出处 《中国激光》 EI CAS CSCD 北大核心 2017年第5期115-122,共8页 Chinese Journal of Lasers
基金 浙江省自然科学基金(LY14D050001)
关键词 薄膜 薄膜器件 消色散 光束整形 均光 散射角 thin films thin-film devices achromatism beam shaping uniform light scattering angles
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