摘要
利用纳秒激光双光束干涉的光刻方法,在光刻胶层制备具有周期性的一维光栅结构样品,并研究其形状记忆特性.结果表明:显影后的样品在环境温度为195℃及压力的作用下,光栅形貌发生改变,光栅垂直高度降低,衍射光强减弱;当样品冷却至室温时,光栅形貌可维持不变;当样品的环境温度为120℃时,光栅形貌恢复原状,实现微观形状记忆功能.
By using the method of two-beam interference of nanosecond laser, we fabricated sample of periodic one-dimensional grating structure on the photoresist layer, and studied its shape-memory characteristics. The results show that the grating morphology of developed sample is changed under the ambient temperature of 195 ℃ and pressure, as well as the vertical height of grating reduced, and the diffraction intensity weakened. When the sample is cooled to room temperature, the grating morphology can remain unchanged. When ambient temperature of the sample is 120 ℃, the morphology of the grating is restored to the original shape, and micro-shape-memory function is realized.
出处
《吉林大学学报（理学版）》
CAS
CSCD
北大核心
2017年第3期702-706,共5页
Journal of Jilin University:Science Edition
基金
国家自然科学基金(批准号:51373064
61435005)
关键词
微加工
双光束干涉
形状记忆聚合物
微图案化
microfabrication
two-beam interference
shape-memory polymer
micropatterning
