摘要
激光差动共焦显微镜具备高空间分辨率特点,但因其逐点扫描成像方式,扫描时间长,易受三维扫描系统不稳定和环境干扰等影响,产生系统漂移,影响仪器的空间分辨率。利用楔块机构高稳定特点,结合刹车机构的自由抱闸特性,设计了一种新型的轴向升降机构,由此构建了结构更具稳定特性的电动三维扫描系统。稳定性实验验证在搭建的激光差动共焦显微镜上进行,经过监测系统在90min内的轴向位置,轴向漂移小于50nm,与原三维扫描系统漂移140nm对比,漂移速度明显减慢,稳定性有显著提升,进而明显改善了差动共焦显微成像效果。
Laser differential confocal microscope owns the characteristics of high spatial resolution. But it must take more time scanning because of the characteristic of scanning imaging point by point, which easy to generate system drift by the effect of the three-dimensional scanning system and environment. A new axial lifting mechanism to construct a highly stable electric three-dimensional scanning system is designedby using the characteristics that wedge mechanism can be operation highly stable and brake mechanism can is broken free. A stability experiment is conductedon the laser differential confocal microscope built by the group. After a half hour the axial positioffs real-time changes of the scanning system is observed, the drift is less than 50nm by using the new three-dimensional scanning system, drift velocity is slower than using the old one which drifts 140nm. It own highly stable characteristic than the old, which significantly improves the differential confocal microscopy imaging.
出处
《光学技术》
CAS
CSCD
北大核心
2017年第3期212-216,221,共6页
Optical Technique
基金
国家自然基金优秀青年基金(51422501)
国家自然基金面上基金(61475020)
关键词
光学测量
差动共焦
三维扫描
楔块机构
高稳定
optical measurement
differential confocal
three-dimensional scanning
wedge mechanism
highly stable
