摘要
为了减小传感器定位对测量结果的影响和传感器拆装麻烦以及传感器多问题,提出了一种改进的三点法。该方法通过简化模型,计算出传感器的定位误差、倾斜度误差、错位误差的测量误差值,比较传感器不同方向的误差计算值,结合高精度旋转刻度盘和光栅尺,对测量结构进行改善。实验结果表明,该方法能够正确分离工件的形状误差和回转误差,测量误差能够达到±0.05μm,测量重复性好,能够减小工件的检测成本和安装时间。
In order to reduce the influence of sensor location on the measurement results and the trouble of sensor assembly and disassembly,an improved multiprobe technique is proposed. This method simplifies the model,calculate the measurement error of location error and sensor error,tilt error,calculation error comparing sensor in different directions,combined with high precision rotary dial and grating,the improvement of measurement structure. The experimental results show that this method can correctly separate the shape error and rotation error of the artifact,the measurement accuracy can reach 0. 04μm,the measurement repeatability is good,and the cost and installation time can be reduced.
出处
《组合机床与自动化加工技术》
北大核心
2017年第6期54-58,共5页
Modular Machine Tool & Automatic Manufacturing Technique
关键词
误差分离
三点法
圆度误差
单传感器
旋转刻度盘
error separation
multiprobe technique
roundness error
single sensor
rotary dial
