摘要
针对快焦比特大非球面度离轴非球面反射镜,设计了3片式Offner补偿器。为应对3片式补偿器对中心偏差及镜间隔严格的公差要求,设计了相应的补偿器镜筒结构。该结构使透镜中心倾斜及平移调整相分离,实现补偿器的高精度装调。根据中心偏差测量仪的测量结果,2片补偿镜之间倾斜误差4.4″,平移误差3.5μm,镜间隔误差3.8μm;补偿镜组与场镜之间倾斜误差5.3″,平移误差4.2μm,镜间隔误差7.2μm,满足检测使用要求。利用该补偿器及4D动态干涉仪对精抛光阶段的离轴非球面进行检测,面形结果PVq值达到0.135λ,RMS值达到0.019 5λ,优于设计要求。
Three-lens Offner compensator was designed for off-axis aspheric surface with fast rati- o and large asphericity. Because tolerance requirement of centering errors and air gap distances is very severe, corresponding barrel structure of compensator is designed. The structure sepa- rates line-centering error adjustment and angle-centering error adjustment, which can achieve high accuracy adjustment of the compensator. According to measuring results of center deviation measuring apparatus, finally angle-centering error between compensating lenses is 4.4＂, line- centering error is 3.5 μm, and air gap distance error is 3.8 μm. Angle-centering error between compensating lenses series and field lens is 5.3＂,line-centering error is 4.2 μm, and air gap dis- tance error is 7.2μm, which meet the demand of testing. Off-axis aspherical surface is tested by 4D interferometer and the compensator,PVq value is 0. 135X and RMS value is 0. 019 5X, better than designing requirements.
出处
《应用光学》
CAS
CSCD
北大核心
2017年第4期639-643,共5页
Journal of Applied Optics
基金
国家自然科学基金(11203049)
关键词
光学检测
离轴非球面
零位补偿器
镜筒结构设计
补偿器装调
optical testing
off-axis aspherical surface
null compensator
design of barrel structure
assembling of compensator
