摘要
薄膜与基体间的界面结合性能是决定薄膜性能的关键因素。如何提高膜-基界面结合强度,保证刀具正常使用寿命,已成为金刚石涂层工具产业化亟待解决的主要问题。文章综述了影响金刚石薄膜附着性能的主要因素,总结了近年来在金刚石薄膜与基体间附着力研究方面的主要进展,并对金刚石薄膜未来发展趋势进行了展望。
Adhesion between the film and substrate is a key factor to determine the film performance. How to improve the film-substrate adhesive strength and ensure service life of tools has become an urgent technical problem for industrializing diamond coated tools. This article reviews major factors that affect the performances of diamond film adhesion. Based on the survey of recent research, works to improve diamond film-substrate adhesion, potential trends for diamond coating are also discussed.
作者
黄磊
王陶
唐永炳
HUANG Lei WANG Tao TANG Yongbing(Functional Thin Films Research Center, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences Shenzhen 518055, China)
出处
《集成技术》
2017年第4期29-37,共9页
Journal of Integration Technology
基金
广东省创新团队项目(2013C090)
广东省自然科学基金(2014A030310482)
深圳市科技计划项目(JCYJ20160122143155757)
中国科学院科研设备项目(yz201440)
关键词
金刚石薄膜
化学气相沉积
膜-基结合力
diamond films
chemical vapor deposition
film-substrate adhesion
