摘要
通过对立式多箱体连续磁控溅射镀膜生产线的工艺方法和工艺装备的改进,改善现有OGS用ITO低温镀膜技术的各项缺陷,并使手机盖板ITO一次成膜工艺得以确定。研究表明:一次成膜工艺制品的热稳定性优良,在200℃下烘烤20min其方块电阻变化△R<4%;透过率均可达到91%左右,色差值△E<1.1,雾度值亦满足要求;一次成膜的生产工艺合格率达到了92~96%以上,可达量产要求。
The defects of ITO low temperature coating films for OGS are reduced by improving the technology and equipment of the vertical multi box continuous magnetron sputtering coating production line, and make the mobile phone cover plate ITO once forming film process can be determined. The results show that the thermal stability of the once forming film process product is excellent, the change of square resistance △R□〈 4% under the condition of baking 20 min with 200℃. The transmittance can reach about 91%, color values △E〈 1.1, and the fog value also meets the requirements. The product ratio meeting the requirements can reach more than 92-96%, which achieve mass production requirements.
作者
徐日宏
张忠义
张振华
王琦
姜宏
XU Rihong ZHANG Zhongyi ZHANG Zhenhua WANG Qi JIANG Hong(Shenzhen JMT Glass Co., Ltd., Huizhou 516000, China A VIC （Hainan） Special Glass Technology Co., Ltd., Chengmai, 571924, China Key Laboratory of Special Glass in Hainan province, Hainan University, Haikou 570228, China)
出处
《真空》
CAS
2017年第4期52-56,共5页
Vacuum
关键词
磁控溅射
ITO薄膜
成膜工艺:一体化触控
Magnetron sputtering
ITO film
Film forming process
One Glass Solution
