摘要
针对激光烧蚀加工出三维表面所存在的几个问题，即沿光轴方向的尺寸精度，必要的表面粗糙度和表面完整性，设计了一种扩束－无球差聚焦光路系统，并配合适当的激光焦斑峰值功率密度，大大改善了直接切削的尺寸精度，从传热学角度分析了激光烧蚀的能量传输，获得了对激光烧蚀过程的了解，以陶瓷为例的激光烧蚀实验证实了这一分析的正确性，从而为改善激光烧蚀加工的表面粗糙度提供了依据。
Several problems of dimensional precision,surface roughness and surface integrity mustbe solved to obtain three dimensional surface by laser ablation. The dimensional precision isimproved greatly by using focal system with shorter focal depth and choosing appropriatepeak power density at the focal spot. Laser ablation mechanism is understood by analysingheat transfer. Experimental results of laser ablation ceramics show that the analysis areright.
出处
《光学精密工程》
EI
CAS
CSCD
1995年第3期33-37,共5页
Optics and Precision Engineering
基金
国家自然科学基金
关键词
激光烧蚀加工
尺寸精度
去除机理
表面质量
Laser ablation,Dimensional accuracy,Ablation mechanism,Surface integrity
