摘要
为了进一步提高电子束流发生系统工作的可靠性和稳定性,提高电子束加工质量,采用AC-DC-AC-DC-AC-DC的拓扑电路、新型功率变压器、高压脉冲检测技术、优化的束流反馈控制与灯丝加热电流闭环反馈控制技术等,分别优化了高压加速电源、偏压电源与灯丝加热电源。将所研制逆变电源与150 k V/30 k W电子枪、真空系统等组成了一套电子束流发生系统,测试了该电子束流发生系统输出的高压、最大束流以及灯丝加热电流、偏压变化对束流输出的影响。试验结果表明:经过优化的逆变电源高压输出达到-150 k V,高压输出线性度较好,最大束流达到200 m A;高压、灯丝加热电流给定时,随着偏压降低,束流输出逐渐增大;高压、偏压给定时,随着灯丝加热电流增大,束流输出存在死区、线性增大区和恒流区。
In order to enhance the stability and reliability of electron beam source system and improve the machining quality of electron beam,the topology circuit of AC-DC-AC-DC-AC-DC,new power transformer,high voltage pulse detection technology,optimized feedback control technology of electron beam and closedloop control technology of filament current are introduced to optimize high voltage power source,bias voltage power source and filament power source. The inverter power supply,150 k V/30 k W EB gun,vacuum system and others control system were integrated to establish a set of electron beam system. The high voltage,maximal electron beam output,and the influence of bias voltage and filament current on beam output are tested.The results of a series of tests show that the high voltage output of the inverter power supply has a fine linearity,and the maximum beam output is up to 200 m A at the high voltage output up to-150 k V. At given high voltage and current of filament,the electron beam will increase with the decrease of bias voltage. When the high voltage and bias voltage are given changeless,the electron beam output experiences non-beam phase,linear increasable phase and steady changeless phase with the increase of filament current.
出处
《北京航空航天大学学报》
EI
CAS
CSCD
北大核心
2017年第8期1550-1558,共9页
Journal of Beijing University of Aeronautics and Astronautics
基金
工信部基金~~
关键词
逆变电源
高压
电子束
偏压
灯丝加热电流
inverter power supply
high voltage
electron beam
bias voltage
filament heating current
