摘要
针对目前纤毛式MEMS矢量水听器灵敏度和带宽的相互制约,无法实现在高灵敏度的情况下还能有较大的可测带宽。基于此,设计了一种单梁结构的一维MEMS矢量水听器,经理论分析和ANSYS仿真分析,确定了微结构的尺寸,仿真结果显示有挖空式结构较无挖空式结构在X轴最大应力上提高了5.12%,探测带宽增大了53.26%。并对挖空式微结构进行了工艺设计,简化了工艺流程,提高了成品率。最后,用矢量水听器校准装置进行测量,实验结果表明,该一维MEMS矢量水听器具有20~2 000 Hz的可测带宽,满足灵敏度每频程6 dB的增长趋势,具有良好的"8"字型指向性,凹点深度为-32.4 dB。
For the mutual constraints between the sensitivity and bandwidth of the current ciliated MEMS vector hydrophone, the hydrophone hasn＇t the larger measurable bandwidth in the case of high sensitivity. Based on this, a one-dimensional MEMS vector hydrophone with single beam structure was designed. The size of the microstructure was determined by theoretical analysis and ANSYS simulation analysis. The simulation results show that the X-axis maximum stress of the hollow structure increases by 5.12% and the detection bandwidth increases by 53.26% compared with the no hollow structure. Later, the process design of the hollow microstructure was carried out to simplify the process flow and improve the yield. Finally, the measurement was carried out with a vector hydrophone calibration device. The experimental results show that the one-dimen- sional MEMS vector hydrophone has a measurable bandwidth of 20 - 2 000 Hz, which satisfies the sensitivity growth trend of 6 dB for each frequency range, and possesses the good ＂ 8＂ shape directivity and the depth of concave point is - 32.4 dB.
出处
《微纳电子技术》
北大核心
2017年第10期677-683,共7页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61127008)
国家重点研发计划资助项目(2016YFC0101900)
中国博士后科学基金资助项目(176704)
山西省应用基础研究资助项目(201601D011035)
