摘要
由于电子与物质的强相互作用,从电子枪发出的2X107电子伏特的高能电子束能穿透的材料厚度也只有约300纳米,因此样品必须非常薄才适合使用透射电子显微镜进行观测。要制备非常薄的透射电镜样品需要经过包括机械研磨和离子溅射等一系列的减薄过程,这些过程均会对样品表面造成一定程度的损伤。表面损伤会影响对样品真实微结构的观测和表征,因此了解样品制备过程中样品表面的损伤情况对于材料微结构研究具有重要意义。本文介绍了如何利用透射电镜观察样品表面损伤的成像方法、实验技巧和操作技术的细节。利用透射电镜的不同成像衬度模式能够在样品的同一视场中观察到包括样品表面损伤的材料结构细节,可以在多层次和不同尺度上获得更丰富的微结构信息。
The samples for TEM observation must be very thin. Usually, the TEM samples are prepared by mechanical dimpling and ion milling, which can lead to the remarkably surface damages of the sample. The surface damages are disadvantages for TEM observation. The observation and estimation of the surface damages via TEM are respectively described in details in present study. More information about the microstructures and surface damages in the same position can be revealed by combining the TEM images with the different contrasts.
作者
王岩国
丁力栋
顾建伟
闫征
胡民培
Wang Yanguo Ding Lidong Gu Jianwei Yan Zheng Hu Minpei(Center for Technology and Engineering of Fast Quenched Materials, Nanjing Tengyuan Soft Magnetics Ltd., Nanjing 211300, China Jiangsu Electric Devices for Amorphous Materials Ltd. , Taizhou 225500, China Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China)
出处
《分析仪器》
CAS
2017年第5期71-76,共6页
Analytical Instrumentation
基金
江苏省重点研发计划项目(项目批准号BE2015216)
关键词
电子显微学
样品制备
表面损伤
表面观察
离子溅射
TEM
preparation of TEM samples
surface damage
observation of the surface damage
ion milling
