摘要
基于Zernike多项式拟合三平面互检法,在理论上对光轴偏离、旋转角度以及有效面积对不同面型精度平面的测量误差进行了分析,并分别进行了实验验证.研究结果表明,旋转角度误差和有效面积对测量影响不敏感,可适当降低标定旋转角度成本;而光轴偏离对测量精度影响明显,在高精度面型绝对检测中应对其进行严格校准.
Based on Zernike polynomials fitting,the measurement errors posed by optical axis deviation,rotation angle and active area on different types of high-precision surface were analyzed and the experimental verifications were conducted respectively.The results show that the measurement is not sensitive to the rotation angle and active area,the cost of calibrated rotation angle can therefore be reduced,while the impact of optical axis deviation on measurement precision is rather significant,which should be strictly adjusted before the test on high-precision surface.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2017年第9期181-188,共8页
Acta Photonica Sinica
基金
科技部国际合作专项(No.2015DFA10360)资助~~
