摘要
提出了阵列式芯片特定区域内微流体的加热方法,研制了4×4阵列式聚二甲基硅氧烷芯片及其特定区域的加热组件。在128°YX-LiNbO3基片上光刻16个叉指换能器,其激发的SAW驱动压电基片上油相流体,使其输运到待加热区的传热柱上,在油相流体两侧的叉指换能器上加电信号,激发SAW加热油相流体,并通过传热柱加热阵列式芯片受热区内微流体。以石蜡油微流体为实验对象进行阵列式芯片特定区域微流体加热实验,结果表明,SAW可有效加热阵列式芯片特定区域内石蜡油微流体,在30.0dBm电信号功率作用下,使7.5μL石蜡油温度从22.3℃上升到33.5℃。
A new heating method for the microfluidic in a specific area of an array chip is presented in this paper.A 4×4 array polydimethylsiloxane chip with heating elements are developed.Sixteen IDTs are fabricated on a128°YX-LiNbO3 substrate for exciting surface acoustic waves,which are used to drive the oil droplet on the piezoelectric substrate to transport the oil droplet to the heat pillar in the area to be heated.The IDTs at side of the oil droplet are applied to an electric signal.The oil droplet is then heated,and the temperature of the microfluid to be heated in the array chip is raised due to the thermal transmittance of the heat transfer pillar.The microfluidic heating experiment of the array chip in a specific area is carried out with the paraffin oil microfluid as the experimental object.The results show that surface acoustic wave can heat the paraffin oil microfluid in the specific area of the array chip.The temperature of 7.5μL paraffin oil is raised from 22.3℃to 33.5℃at 30.0 dBm electric signal power.
出处
《压电与声光》
CSCD
北大核心
2017年第5期790-793,共4页
Piezoelectrics & Acoustooptics
基金
常州工学院科研基金资助项目(YN1404)
江苏省创新基金资助项目(201511055039X)
关键词
声表面波
叉指换能器
阵列式芯片
微流器件
加热
surfac e aco us tic wa v e
in te rd ig i ta l tran sd u c e r
a r ra y c h ip
micro fluidic d ev ic e
h eat
