摘要
采用热压烧结工艺,通过实验确定了烧结温度和压力,制备出AlN基衰减瓷。对材料的物理性能进行测试,热导率大于50 W/mK,抗折强度大于360 MPa。同时从工程化应用的角度出发,对衰减瓷的匹配特性和衰减量进行了测试,驻波比小于1.2,隔离度小于-70dB。
The sintering temperature and pressure of hot-pressing process is determined by experiment,and AlN based absorbing ceramics is made.The thermal conductivity of the AlN ceramic is greater than 50W/mK and the flexural strength is greater than 360 MPa.Aiming to engineering application,the matching characteristics and attenuation were tested,the SWR is less than 1.2 and the isolation is less than-70 dB.
出处
《真空电子技术》
2017年第5期24-26,共3页
Vacuum Electronics
关键词
AlN基衰减瓷
制备工艺
性能测试
AlN based absorbing ceramics
Preparation process
Characteristics test
