摘要
在信息化进程中,随着摩尔定律越来越接近极限,将微电子和光电子结合起来,开发硅基大规模光电子集成技术已经成为技术发展的必然和业界的普遍共识.在硅基光电子集成器件中,硅基光源是重中之重.虽然硅是间接带隙半导体材料,发光效率很低,但人们一直没有放弃制备硅基光源.硅基光源包括硅基光波导放大器、发光二极管、激光器等,其中硅基光波导放大器又是激光器的基础,是硅基光电子集成回路中不可或缺的器件,如果光波导放大器有足够高的净增益,在光波导放大器的两端设计合适的谐振腔就可以获得光泵的激光.本文着眼于硅基光波导放大器,介绍了目前硅基光波导放大器最主要的两个研究方向,即硅基混合集成Ⅲ- Ⅴ族半导体光波导放大器和硅基掺稀土离子光波导放大器.并分别讨论了这两个研究方向的原理、制备方法、发展过程等,列举了相关的典型研究成果,最后简单介绍了其他光放大技术,并做了相应的分析、总结和展望.
In the process of informatization, the Moore’s Law is getting closer to the limit. Combining microelectronics and optoelectronics to develop silicon-based large-scale integrated optoelectronic technology has become the industry consensus. It is also the inevitable direction of technology development. In recent years, silicon photonics has made great progress, many key devices have reached the commercial standard, and some of the performance is even higher than the current commercial device performance. In silicon based optoelectronic integrated devices, silicon based light source is the most important but has not yet been completely resolved. Although silicon is an indirect band gap semiconductor material and luminous efficiency is very low, people have not given up efforts to prepare silicon based light source. Silicon based light sources include silicon based optical waveguide amplifiers, light emitting diodes, lasers, etc., of which silicon based optical waveguide amplifier is the basis for lasers and the indispensable device in a silicon based optoelectronic integrated circuit. If the optical waveguide amplifier has a high net gain, optically pumped lasers can be obtained by designing the appropriate resonant cavities at both ends of the optical waveguide amplifier. In this paper, we focus on silicon based optical waveguide amplifier, introducing the two main research directions of silicon based waveguide amplifier, silicon based hybrid integrated III-V semiconductor optical waveguide amplifier and silicon based rare earth ion doped optical waveguide amplifier. This paper discusses the principle, preparation method and development process of these two research directions in detail respectively, and lists relevant typical research results. And we briefly introduce other optical amplification technology. Finally, summary and prospect are given.
出处
《中国科学：物理学、力学、天文学》
CSCD
北大核心
2017年第12期1-19,共19页
Scientia Sinica Physica,Mechanica & Astronomica
基金
国家自然科学基金(编号:61377056
61635001)
教育部新世纪优秀人才计划资助
关键词
硅基光电子学
硅基集成光波导放大器
Ⅲ-
Ⅴ族半导体光放大器
掺稀土离子光波导放大器
silicon photonics, silicon based integrated optical waveguide amplifier, Ⅲ- Ⅴ semiconductor optical amplifier, rareearth ion doped optical waveguide amplifier
