4Meili Hu, Jinjin Chen, Zongsheng Lai, et al. Research for Polyimide as a Sacrificial Layer in MEMS Device [ C ], Fifth International Conference on Thin Film Physics and Applications, Bellingham, SPIE,2004,5774:642-645.
5A Bagolini, L Pakala, T L M Scholtes, et al. Polyimide sacrificial layer and novel materials for post -processing surface micromachining [ J]. journal of micromechanics and microengineeing, 2002 (12) : 385 - 389.
