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薄膜传感器实验教学创新与实践 被引量:2

Innovation and Practice on Experimental Teaching of Thin Film Sensors
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摘要 该文将器件理论教学与具体实验操作有机结合,对薄膜传感器制备技术实验课程的设计和教学方式进行了创新。设计了薄膜温度传感器制备的实验方案,采用多种薄膜制备手段,搭建了相关器件性能的测试平台并对实验的考核评价体系进行了创新。创新的实验设计吸引了多学科的学生加入,训练了学生的主动思考和动手能力,为建立创新型人才培养体系奠定了基础。 Combined with the theory of thin film device and the experimental operation, an innovation is performed on the design and teaching of experiment course of thin film sensor fabrication. The project of thin film temperature sensor fabrication was de-signed. Multiple thin film fabrication methods were used, the test platforn of the perfor^nance of related devices was set up and the e-valuation system of experiment was innovated. Meanwhile, the evaluation system of the experiment course was improved. The innovated experiment has attracted some students from different majors to join, and trained the students’ active thinking and practice ability. It laid the foundation on the establishment of innovative personnel training system.
作者 赵晓辉 ZHAO Xiaohui(National Demonstration Center for Experimental Education of Electronic Information Materials and Devices Lniversity of Electronic Science and Technology of China, Chengdu 610054, China)
出处 《实验科学与技术》 2017年第6期103-106,共4页 Experiment Science and Technology
基金 电子科技大学本科教育教学改革研究项目(2013XJYEL007)
关键词 薄膜 传感器 课程设计 创新实践能力 thin film sensor course design capability of innovation and practice
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