摘要
多年来,在真空镀膜生产中,镀膜后工件表面污点的出现,造成废品率偏大的问题,一直是困扰该行业的一大难题。分析可能产生此问题各种原因,提出解决此问题的思路和方案,对真空室抽气系统结构进行优化设计。通过镀膜试验验证,优化设计的结构,很好的解决了工件表面污点的产生,降低了工件的废品率和生产成本,从结构原理上得到彻底的解决,证明新结构设计的正确性。
For many years, in the vacuum coating production, the appearance of the surface defect after coating has caused the waste rate to be too large. It has been a major problem that puzzles the industry. This paper analyzes the possible causes of this problem, and puts forward the ideas and solutions to solve the problem. The structure of the vacuum pumping system is optimized. By coating test, the optimization design of the structure produces a good solution to the workpiece surface stain,reduces the reject rate of artifacts and production cost, solves thoroughly from the structure principle, and proves the correctness of the new structure design.
作者
吴会营
刘欣宁
刘旸
WU Hui-ying1, LIU Xin-ning 2, LIU Yang 2(1. Nanyang Cigarette Factory of China Tobacco Henan Industrial Co., Ltd., Nanyang 473000, China; 2. Henan Polytechnic Institute, Nanyang 473000, Chin)
出处
《真空》
CAS
2018年第2期42-44,共3页
Vacuum
基金
2016河南省科技攻关项目(162102210373)
关键词
真空镀膜
真空抽气系统
真空系统设计
真空室
vacuum coating
vacuum pumping system
vacuum system design
vacuum chamber