摘要
基于可调谐二极管激光吸收光谱(TDLAS)技术,以中心波长为760.3nm的垂直腔面发射激光器(VCSEL)为核心,开发了一款能快速、灵敏、实时、在线地监测氧气浓度的传感器。根据锁相放大模块对调制的吸收信号进行解调,得到二次谐波(2f)信号幅值与O_2浓度的线性函数关系,通过实验数据对该传感器进行验证。实验分析结果表明,该传感器的线性和抗干扰性均满足要求,响应时间为9s,最佳积分时间为18s,对应的检测限低至质量分数78×10^(-6)。该非接触式高灵敏度的在线激光氧气传感器能实时检测开放光程下的氧气浓度,可应用于对氧气浓度检测要求较高的工业现场,对能源利用率的提高及生产生活安全的保障意义重大。
In order to provide a fast,sensitive and online oxygen（O2）detection device,this paper built a sensor based on tunable diode laser absorption spectroscopy（TDLAS）with a vertical cavity surface emitting laser（VCSEL）as optical source,whose center emitting wavelength is 760 nm.According to the demodulating of the modulated absorption signal based on the phase-locked amplifier module,the linear function relationship of second harmonic（2 f）signal amplitude and concentration of O2 is verified through the experimental data of the sensor.The experimental analysis results show that the linearity and anti-interference of the sensor meet the requirements,the response time is 9 s,the best integration time is 18 s,and the corresponding detection limit is low to mass fraction 78×10^-6.The non-contact high-sensitivity on-line laser oxygen sensor can detect the oxygen concentration under optical path in real time.It can be applied to the industrial field with high demand for oxygen concentration detection,which is significant for improving the utilization of energy and ensuring the safety of production and life.
作者
刘云
王伟峰
付作伟
LIU Yun;WANG Weifeng;FU Zuowei(Shanxi Environmental Monitoring Center, Taiyuan Shanxi 030024, China;College of Safety and Engineering,Xi’an University of Science and Technology, Xi’an Shaanxi 710054,China;China Creation Precise Instrument （Tianjin） Technology Co. , Ltd. , Tianjin 300384, China)
出处
《山西化工》
2018年第1期54-57,共4页
Shanxi Chemical Industry
基金
国家自然科学基金青年项目(51504186)
陕西省自然科学基础研究计划(2017JM5114)
关键词
可调谐激光吸收光谱
氧气传感器
在线
开放光程
tunable diode laser absorption spectroscopy oxygen sensor on-line open path
