摘要
在分析静电透镜电子光学理论的基础上,提出电场优化计算的目标函数,借助ANSYS软件确定了透镜电极中心点电位、优化设计透镜极的尺寸;同时利用Magic粒子模拟软件得到电子束包络线,聚焦效果满足设计指标.实验结果表明,随着外加电压逐步增加,收集极上的光斑向中心汇聚,亮度增强,电压过高时出现光斑发散.电压为60kV时,具有理想的聚焦效果,束斑直径在10mm左右,达到了设计要求.
Based on analyzing electrostatic lens electron optics theory,the central potentials of the electrodes are obtained by means of ANSYS software.On the basis of that the optimized criterion function is proposed,to provide the theory and method for the size of the lens.Meanwhile the electron beam envelope is simulated by using Magic software,which showed the focusing effect has met the design index.By observing the brightness and size of the beam spot on circular fluorescent plate collector,it is found the beam spot becomes brighter and smaller with the applied voltage gradually increasing.The spot divergence occurs when the voltage is too high.The experimental results show that the electrostatic lens achieve an ideal focusing effect in 60 kV;with a beam diameter of about 10 mm,the focusing effect meets the design requirements.
作者
陈俊
陈仕修
高深
季曾超
CHEN Jun;CHEN Shixiu;GAO Shen;JI Zengchao(School of Electrical Engineering ,Wuhan University,Wuhan 430072, China;School of Electrical ＆ Electronic Engineering, Huhei University of Technology, Wuhan 430068, China)
出处
《武汉大学学报（工学版）》
CAS
CSCD
北大核心
2018年第5期465-470,共6页
Engineering Journal of Wuhan University
基金
国家自然科学基金项目(编号:11075123,51207171)
关键词
静电透镜
电子束
轴对称静电场
粒子模拟软件
electrostatic lens
electron beam
axisymmetrical electrostatic field
Magic software
