摘要
为了满足先进制造工艺的对检测技术越来越高的要求,对材料表面的测量既有高精度的要求,同时也有快速检测的需求。彩色共聚焦测量技术从原理上避免了轴向扫描过程,与传统的激光共聚焦技术相比,具有明显的测量速度优势,可针对大尺寸的被测物表面形貌进行快速化检测。通常情况下,针对不同测量需求的被测对象,需要设计不同的彩色共聚焦系统核心部件-色散物镜,增加了系统的复杂性。针对这一情况,采用色散和聚焦分离的设计方式,通过切换物镜参数的方式,快速有效地实现不同测量需求。所设计的大范围色散元件结合不同聚焦物镜时,能实现对色散范围的调制,并以此为基础搭建了聚焦和色散分离的彩色共聚焦系统。实验结果表明,采用不同参数物镜时,可实现对量程和分辨率的调制;其中,当采用10×（NA=0.3）物镜时,可获得轴向225μm的线性色散,此时测量系统的轴向测量精度优于0.2μm。
In order to meet the increasing stringent requirements of the processing technology,both high precision and high speed are necessary for surface topography technology.Compared with confocal laser scanning microscopy,the chromatic confocal microscopy has the advantage of fast speed and is more suitable for the measurement of the relatively large surface because it does not require axial scanning.In order to meet the requirements of different measurement objects,different chromatic dispersion object lenses should be designed according to specific measurement specifications,which increases the complexity of the system.Aiming at this problem,a novel design method is proposed in this paper,which adopts the design manner separating the chromatic dispersion and focusing functions,and fast and effectively achieves different measurement demands through switching the objective lens parameters.The designed large range dispersion element combining different objective lenses can achieve the dispersion range modulation.On the basis of above,a chromatic confocal measurement system with focusing and dispersion separated was constructed,and the system axial calibration was conducted.Experiment results indicate that when a 10 ×（NA = 0.3） objective lens is adopted,the linear dispersion in axial range of 225 μm is obtained.The height difference of two gauge blocks was measured with the chromatic confocal measurement system,the measurement and error analysis results indicate that the axial measurement accuracy of the measurement system is better than 0.2 μm.
作者
余卿
张学典
崔长彩
Yu Qing;Zhang Xuedian;Cui Changcai(College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China;Shanghai Key Laboratory of Modern Optical System, School of Optical-Electrical and Computer Engineer, University of Shanghai Science and Technology, Shanghai 200093, China;Institute of Manufacturing Technology, Huaqiao University, Xiamen 361021, China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2018年第3期100-107,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金青年项目(51505162)
福建省科技计划项目-对外合作项目(2015I0004)
华侨大学中青年教师科研提升计划(ZQN-PY304)项目资助
关键词
彩色共聚焦测量
光学表面形貌检测
测量范围调制
测量精度调制
chromatie confocal measurement
optical surface topography measurement
measurement range modulation
measurement accuracy modulation
