摘要
传统透射电子显微镜（TEM）观察液态样品特征时,通常将其先速冻成固态,而原位TEM可以动态地观察液态样品的变化,避免了一些额外因素的影响。设计了一款基于微机电系统（MEMS）技术的非流动原位液体TEM芯片,用于对液态样品结构动态变化的实时观测。采用低压化学气相沉积（LPCVD）法制备50 nm厚的低应力氮化硅薄膜作为芯片的电子束透射窗的材料,并在窗口层上面制作金属网格来加固其承载能力,采用MEMS技术完成了芯片的制造。实验结果表明,TEM芯片在相应的TEM样品杆的辅助下,成功实现了对铜纳米粒子生长过程中形态变化的实时观测。
The liquid samples are usually frozen into solid state for observing their characteristics by the traditional transmission electron microscopy（TEM）.The in-situ TEM can directly observe the change of liquid samples to avoid the effects of some additional factors.In order to observe the real-time structure dynamic changes of liquid samples,an in-situ non-flow liquid cell TEM chip based on micro-electromechanical system（MEMS）was designed.The low stress silicon nitride membrane with a thickness of 50 nm was prepared by the low pressure chemical vapor deposition（LPCVD）method,which was used as a material for the electron beam transmission window of the chip,and the metal grid was made on the window layer to strengthen its bearing capacity.The chip was fabricated by MEMS technology.The experiment results show that during the growth of copper nanoparticles,the real-time observation of morphology changes is successfully realized by the TEM chip assisted with the corresponding TEM sample rod.
作者
焦磊涛
蒋文静
欧文
Jiao Leitao;Jiang Wenjing;Ou Wen(Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;JiangsuR ＆ D Center for Internet of Things, Wuxi 214135, China;University of Chinese Academy of Sciences, Beijing 100049, China)
出处
《微纳电子技术》
北大核心
2018年第7期493-497,共5页
Micronanoelectronic Technology
基金
国家重点研发计划资助项目(2016YFA0401301)
